Journal of Micromechanics and Microengineering · 2008 · 64 citations · 19 references
EngineeringMechanical EngineeringMicroelectromechanical SystemsStructural DynamicsVibrationMems DesignMems ModelingMems ResonatorsNonlinear MechanicsResonant CircuitsBeam MechanicsFrequency StabilityMicromechanical OscillatorsNonlinear EffectsNonlinear Spring BehaviorNonlinearityResonator Frequency StabilityResonator Modeling
10.1088/0960-1317/18/6/065014
19
Ali H. Nayfeh, Dean T. Mook, Phillip Holmes · Journal of Applied Mechanics · 1980 · 4.7K citations
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