Publication | Open Access
Tuning of sculptured-thin-film spectral-hole filters by postdeposition etching
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Citations
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References
2007
Year
Materials ScienceOptical MaterialsEngineeringPhysicsMicrofabricationOptical PropertiesPostdeposition Chemical EtchingPhotonic MaterialsApplied PhysicsSpectral-hole FiltersFabrication TechniqueThin FilmsPlasma EtchingOptoelectronicsSculptured-thin-film Spectral-hole FiltersNanophotonicsNanolithography Method
Postdeposition chemical etching of spectral-hole filters, which were fabricated as chiral sculptured thin films with central 90-deg-twist defects, decreases the cross-sectional dimensions of the helical columns that such films comprise and blueshifts the spectral holes, thereby establishing the efficacy of postdeposition chemical etching as a means to tune the optical response characteristics of sculptured thin films.
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