Simple technique for separating the effects of interface traps and trapped-oxide charge in metal-oxide-semiconductor transistors

P. J. McWhorter, P.S. Winokur

Applied Physics Letters · 1986 · 774 citations · 10 references

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Abstract

A new technique is presented for separating the threshold-voltage shift of a metal-oxide-semiconductor transistor into shifts due to interface traps and trapped-oxide charge. This technique is applied to threshold-voltage shifts on an n-channel transistor that result from ionizing radiation.

References

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