A HRXRD and nano-indentation study on Ne-implanted 6H–SiC

Chaoliang Xu, C.H. Zhang, J.J. Li, Li Zhang, Yimin Yang, Yin Song, Xiaolong Jia, Jianyang Li, K.Q. Chen

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2012 · 27 citations · 25 references

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