Concepedia

Generation of pulsed direct-current plasma above 100 torr for large area diamond deposition

W.-S. Lee, Ki‐Woong Chae, Kwang Yong Eun, Young‐Joon Baik

Diamond and Related Materials · 2001 · 10 citations · 8 references

DOI

Concepts

References

8

Growth of diamond particles from methane-hydrogen gas

Seiichiro Matsumoto, Yoichiro Sato, Masayuki Tsutsumi et al. · Journal of Materials Science · 1982 · 646 citations

, , +4

Electrical and structural properties of low resistivity tin-doped indium oxide films

Yuzo Shigesato, Satoru Takaki, T. Haranoh · Journal of Applied Physics · 1992 · 362 citations

, , +17

Novel microwave plasma reactor for diamond synthesis

M. Füner, C. Wild, P. Koidl · Applied Physics Letters · 1998 · 200 citations

, , +13

Activity of tungsten and rhenium filaments in CH<sub>4</sub>/H<sub>2</sub> and C<sub>2</sub>H<sub>2</sub>/H<sub>2</sub> mixtures: Importance for diamond CVD

M. Sommer, F. W. Smith · Journal of materials research/Pratt's guide to venture capital sources · 1990 · 98 citations

, , +9

An optical emission study of the glow-discharge deposition of hydrogenated amorphous silicon from argon-silane mixtures

F. J. Kampas · Journal of Applied Physics · 1983 · 55 citations

, , +17