Optics Letters · 1993 · 47 citations · 2 references
EngineeringManufacturing EngineeringMicrofabricationOpticsPhotonicsColor ImagingColor SeparationIntegrated OpticsIntegrated PhotonicsPhotonic Integrated CircuitsSilicon PhotonicsFocal Plane ArraysFocal Plane OpticsMicro-lens ArraysSilicon Wafer Processing
We describe the preliminary design, fabrication, and demonstration of an array of micro-optics that is used to separate colors locally on the focal plane. The 64 x 64 array combines 100 microm x 100 microm, F/2 refractive microlenses with a 17-microm period grating. The microlenses concentrate the incoming radiation, while the grating disperses the radiation according to wavelength. The element, with a minimum feature size of 1 microm and total depth of 8 microm, is fabricated on a silicon wafer (for use in the 8-12-microm band) by means of a nonstandard binary-optics process.
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Fabricating binary optics: Process variables critical to optical efficiency
M. B. Stern, Michael Holz, S. S. Medeiros et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 38 citations
Engineering, Manufacturing Engineering, Materials Engineering +15