Concepedia
Thin Solid Films · 1979 · 17 citations · 6 references
Materials ScienceChemical EngineeringEngineeringNanoporous MaterialCorrosionSurface ScienceAqueous HfPorous MembranePorous BodyPorosityWater TreatmentChemistryAnodic TreatmentAnodizingPorous Silicon Formation
6
Electropolishing Silicon in Hydrofluoric Acid Solutions
Dennis R. Turner · Journal of The Electrochemical Society · 1958 · 623 citations
Materials Science, Hydrofluoric Acid Solutions, Chemical Engineering +14
Etch Channel Formation during Anodic Dissolution of N-Type Silicon in Aqueous Hydrofluoric Acid
M. J. J. Theunissen · Journal of The Electrochemical Society · 1972 · 171 citations
Channel Formation, Chemical Engineering, Electrical Engineering +11
Formation and Properties of Porous Silicon and Its Application
Y. Watanabe, Yoshinobu Arita, Takashi Yokoyama et al. · Journal of The Electrochemical Society · 1975 · 158 citations
Engineering, Nanoporous Material, Integrated Circuits +17
Structure of Porous Silicon Layer and Heat‐Treatment Effect
Takashi Unagami, Masahiro Seki · Journal of The Electrochemical Society · 1978 · 107 citations
Materials Science, Engineering, Porous Silicon Layer +12
Formation and Properties of Porous Silicon Film
Yoshinobu Arita, Yoshio Sunohara · Journal of The Electrochemical Society · 1977 · 102 citations
Materials Science, Materials Engineering, Engineering +11