Journal of Physics E Scientific Instruments · 1971 · 50 citations · 5 references
Natural SciencesMaterials SciencePhysicsElectromagnetismElectronic MaterialsMaterials PhysicsElectrical CharacterizationElectrical ConductivityElectron Beam PhysicsElectron MicroscopySurface ChargeCharge ScreeningCharging EffectsParticle Charging In Electric FieldsResistivityScanning Electron MicroscopyScanning Electron Microscopy AnalysisSpecimen ChargingSurface Charge Measurement
A mechanism for the 'charging' artifacts which obscure detail on SEM images of high resistivity specimens is described. An interaction equation, relating the properties of specimen and environment, predicts negative charge build-up and large potential fields. Charging effects are traced to the specular deflection of beam electrons in these fields, and experiments with uncoated polymer fibres are described.
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