Helium detection using a planar integrated micro-mass spectrometer

Miniature toroidal radio frequency ion trap mass analyzer

Stephen A. Lammert, Alan A. Rockwood, Miao Wang et al. · Journal of the American Society for Mass Spectrometry · 2006 · 124 citations

Natural Sciences, Chemistry, Analytical Chemistry +11

Sub-miniature ExB sector-field mass spectrometer

J. A. Diaz, Clayton F. Giese, W. Ronald Gentry · Journal of the American Society for Mass Spectrometry · 2001 · 86 citations

Engineering, Chemistry, Instrumentation +15

Silicon based quadrupole mass spectrometry using microelectromechanical systems

Stephen Taylor, Randy Tindall, R.R.A. Syms · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 78 citations

Engineering, Electrical Engineering, Instrumentation +13

Complex MEMS: a fully integrated TOF micro mass spectrometer

Eric Wapelhorst, Jan-Peter Hauschild, Jörg Müller · Sensors and Actuators A Physical · 2007 · 72 citations

Engineering, Chemistry, Mechatronics Engineering +14

Mass spectra measured by a fully integrated MEMS mass spectrometer

Jan-Peter Hauschild, Eric Wapelhorst, Jörg Müller · International Journal of Mass Spectrometry · 2007 · 70 citations

Engineering, Chemistry, Mechatronics Engineering +14