Phase composition and conductivity of sputtered tantalum

Measurement of Sheet Resistivities with the Four-Point Probe

F. M. Smits · Bell System Technical Journal · 1958 · 1.6K citations

Materials Science, Circular Samples, Engineering +15

Vacuum Deposition of Thin Films

L. Holland, Joseph Greenspan · Journal of The Electrochemical Society · 1957 · 861 citations

Materials Science, Thin Film Physics, Engineering +12

A NEW STRUCTURE IN TANTALUM THIN FILMS

M. H. Read, Carl Altman · Applied Physics Letters · 1965 · 220 citations

Materials Science, Materials Engineering, Material Analysis +3

Effects of Nitrogen, Methane, and Oxygen on Structure and Electrical Properties of Thin Tantalum Films

D. Gerstenberg, C. J. Calbick · Journal of Applied Physics · 1964 · 179 citations

Engineering, Tantalum Films, Solid-state Chemistry +19

Thin Films Deposited by Bias Sputtering

L. I. Maissel, Philipp Schaible · Journal of Applied Physics · 1965 · 170 citations

Materials Science, Materials Engineering, Chemical Engineering +15