Nanocrystalline silicon formation in a SiH4 plasma cell

Kinetics of Precipitation.

Silvester Liotta · Journal of the American Chemical Society · 1965 · 885 citations

Natural Sciences, Chemistry, Analytical Chemistry +5

Laser-Induced-Fluorescence Detection of SiH₂ Radicals in a Radio-Frequency Silane Plasma

Akihiro Kono, Naoki Koike, Kenichi Okuda et al. · Japanese Journal of Applied Physics · 1993 · 65 citations

Natural Sciences, Chemistry, Physics +12

Experimental investigation of particulate formation in He-SiH₄modulated RF discharges

Yutaka Watanabe, Masaharu Shiratani · Plasma Sources Science and Technology · 1994 · 21 citations

Natural Sciences, Materials Science, Physics +13