Concepedia

Masanori Otobe

MO

13

Publications

637

Citations

12

H-Index

1992

Active since

Affiliations

Tokyo Institute of Technology(Current)

Masanori Otobe is an author at Tokyo Institute of Technology specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceNanotechnologyNanomaterialsMicrofabricationChemistryMicroelectronicsNanomanufacturingNanophysics

Publications per year

1992–2002

13

Publications

13

Photoluminescence mechanism in surface-oxidized silicon nanocrystals

Yoshihiko Kanemitsu, Shinji Okamoto, Masanori Otobe et al. · Physical review. B, Condensed matter · 1997 · 156 citations

Engineering, Optoelectronic Devices, Chemistry +18

Fabrication of Nanocrystalline Silicon with Small Spread of Particle Size by Pulsed Gas Plasma

Toru Ifuku, Masanori Otobe, Akira Itoh et al. · Japanese Journal of Applied Physics · 1997 · 122 citations

Engineering, Plasma Combustion, Chemistry +22

CMOS metal replacement gate transistors using tantalum pentoxide gate insulator

Amitava Chatterjee, R. A. Chapman, K. Joyner et al. · 2002 · 71 citations

Electrical Engineering, Engineering, Nanoelectronics +8

Fabrication and Electrical Characteristics of Single Electron Tunneling Devices Based on Si Quantum Dots Prepared by Plasma Processing

Amit Dutta, Masao Kimura, Yoshiaki Honda et al. · Japanese Journal of Applied Physics · 1997 · 44 citations

Engineering, Coulomb Blockade, Plasma Processing +20

Preparation of Microcrystalline Silicon Films by Very-High-Frequency Digital Chemical Vapor Deposition

Masanori Otobe, Shunri Oda · Japanese Journal of Applied Physics · 1992 · 43 citations

Engineering, Grain Size Limitation, Chemical Deposition +16

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