Concepedia
Thin Solid Films · 2001 · 31 citations · 6 references
Materials ScienceMaterials EngineeringEngineeringCarbon-based MaterialSilicon–carbon Alloy FilmsApplied PhysicsCarbon MaterialsThin FilmsCarbon-based FilmsChemical Vapor DepositionHot-wire Cvd
6
Formation of Silicon-Based Thin Films Prepared by Catalytic Chemical Vapor Deposition (Cat-CVD) Method
Hideki Matsumura · Japanese Journal of Applied Physics · 1998 · 228 citations · Full text
Materials Science, Chemical Engineering, Engineering +13
Hydrogenated amorphous silicon carbide as a window material for high efficiency a-Si solar cells
Yoshihisa Tawada, M. Kondō, H. Okamoto et al. · Solar Energy Materials · 1982 · 202 citations
Materials Science, Window Material, Electrical Engineering +9
Improved Properties of Silicon Nitride Films Prepared by the Catalytic Chemical Vapor Deposition Method
Shinya Okada Shinya Okada, Hideki Matsumura · Japanese Journal of Applied Physics · 1997 · 48 citations
Engineering, Vacuum Device, Chemical Deposition +18
Optoelectronics and Photovoltaic Applications of Microcrystalline Sic
Yoshihiro Hamakawa, Yuki Matsumoto, Gustavo A. Hirata et al. · MRS Proceedings · 1989 · 46 citations
Materials Science, Electrical Engineering, Engineering +3
CAT-CVD Process and its Application to Preparation of Si-Based Thin Films
Hideki Matsumura, Atsushi Masuda, Akira Izumi · MRS Proceedings · 1999 · 18 citations
Materials Science, Engineering, Microfabrication +10