The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing

A graphical representation of the piezoresistance coefficients in silicon

Yozo Kanda · IEEE Transactions on Electron Devices · 1982 · 890 citations

Materials Science, Room Temperature, Crystal Structure +14

Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers

G. Y. Chen, Thomas Thundat, Eric A. Wachter et al. · Journal of Applied Physics · 1995 · 537 citations

Engineering, Micromechanics, Mechanical Engineering +16

Surface Stress in the Self-Assembly of Alkanethiols on Gold

Rüdiger Berger, Emmanuel Delamarche, H.P. Lang et al. · Science · 1997 · 534 citations

Materials Science, Langmuir-type Adsorption Kinetics, Engineering +11

Environmental sensors based on micromachined cantilevers with integrated read-out

Anja Boisen, Jacob Thaysen, Henriette Jensenius et al. · Ultramicroscopy · 2000 · 268 citations

Engineering, Sensors, Microfabrication +6

Design and performance of a microcantilever-based hydrogen sensor

David R. Baselt, Bernd Frühberger, E.H. Klaassen et al. · Sensors and Actuators B Chemical · 2002 · 227 citations

Engineering, Microfabrication, Hydrogen Transport +5