Plasma Processes and Polymers · 2007 · 51 citations · 14 references
EngineeringPolymeric SubstratesVacuum DeviceChemical DepositionPlasma ProcessingChemical EngineeringCorrosionSilica-like FilmsThin Film ProcessingProtective CoatingMaterials ScienceMaterials EngineeringThermal Spray CoatingSurface TreatmentMulti-functional CoatingPolymer FoilsSilica-like CoatingsSurface ScienceApplied PhysicsThin FilmsApg DischargeChemical Vapor DepositionElectrical Insulation
Silica-like coatings were deposited on polymer foils in APG discharge in a roll-to-roll configuration. The dependence of film structure and chemical composition on the conditions during deposition process was studied by means of SEM, ATR-FTIR, and XPS analysis. The influence of oxidant concentration on the deposited film properties is analyzed and discussed. It was observed that pulsing of the APG discharge suppresses dust formation in atmospheric plasma and, therefore, provides uniform coatings.
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