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Atomic-scale imaging of individual dopant atoms and clusters in highly n-type bulk Si

Materials ScienceNanoscale ScienceEngineeringPhysicsMicroscopyScanning Probe MicroscopyApplied PhysicsIndividual Dopant AtomsAtomic PhysicsMicroanalysisSemiconductor Device FabricationAtomic-scale ImagingN-type Bulk SiSilicon On Insulator