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Anion-controlled passivation effect of the atomic layer deposited ZnO films by F substitution to O-related defects on the electronic band structure for transparent contact layer of solar cell applications

Materials ScienceEngineeringF SubstitutionOxide ElectronicsIntrinsic ImpurityApplied PhysicsSemiconductor MaterialThin FilmsAtomic LayerPhotovoltaicsThin Film ProcessingAnion-controlled Passivation Effect