Publication | Open Access
The influence of abrasive size on high-pressure chemical mechanical polishing of sapphire wafer
50
Citations
17
References
2015
Year
Materials EngineeringMaterials ScienceEngineeringMaterial ProcessingCorrosionMicrofabricationMechanical EngineeringAbrasive SizeSapphire WaferAbrasive ProcessSurface PolishingSurface ProcessingAbrasive MachiningMicrostructure
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