Concepedia

Publication | Closed Access

On mechanisms governing AlN and AlGaN growth rate and composition in large substrate size planetary MOVPE reactors

DOI

17

Citations

10

References

2013

Year

M. Dauelsberg, D. Brien, H. Rauf, F. Reiher, Johannes Baumgartl, Oliver D. Häberlen, A.S. Segal, A.V. Lobanova, E.V. Yakovlev
Journal of Crystal Growth

References

YearCitations

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