Concepedia

Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry

J. M. Leng, J. Chen, J. T. Fanton, Michael W. Senko, K. N. Ritz, Jon Opsal

Thin Solid Films · 1998 · 32 citations · 9 references

DOI

Concepts

References

9

Savitzky-Golay Smoothing Filters

William H. Press, Saul A. Teukolsky · Computers in Physics · 1990 · 11.8K citations · Full text

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<i>Ellipsometry and Polarized Light</i>

R. M. A. Azzam, N. M. Bashara, Stanley S. Ballard · Physics Today · 1978 · 4.3K citations

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Barrier layers: Principles and applications in microelectronics

M. Wittmer · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 202 citations

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Atomic Layer Epitaxy Growth of TiN Thin Films

Mikko Ritala, Markku Leskelä, Eero Rauhala et al. · Journal of The Electrochemical Society · 1995 · 147 citations

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Oxidation of titanium nitride in room air and in dry O2

Harland G. Tompkins · Journal of Applied Physics · 1991 · 118 citations

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