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Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry

Materials ScienceSurface CharacterizationEngineeringOptical PropertiesSurface AnalysisSurface ScienceApplied PhysicsBeam Profile ReflectometryTitanium NitrideThin FilmsBeam Profile EllipsometryThin Film ProcessingDepth-graded Multilayer Coating