Dynamic Analysis of Compliant Mechanisms

Abstract

A systematic method for dynamic analysis of compliant mechanisms is presented including basic formulations for natural frequencies, modes, dynamic response, and frequency characteristics. Methods for design sensitivity analysis are developed to investigate the effect of various design parameters on the dynamic performance of compliant mechanisms. A micro compliant stroke amplifier mechanism, for MEMS actuator application, is presented as a design example to demonstrate significant differences between static and dynamic performance of compliant mechanisms.