Microsystem Technologies · 2002 · 27 citations · 11 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsApplied MechanicsMechatronic DesignActuator DesignActuator IntegrationActuator MaterialsPiezoelectric ActuationPiezoelectric ActuatorsSoft ActuatorsBulk Piezoelectric ActuatorsSoft Actuation
11
Piezoelectric piggy-back microactuator for hard disk drive
Y. Soeno, Shinto Ichikawa, T. Tsuna et al. · IEEE Transactions on Magnetics · 1999 · 80 citations
Engineering, Electrical Engineering, Mechanical Engineering +17