Deposition of tungsten nitride thin films by plasma focus device at different axial and angular positions - Concepedia

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Deposition of tungsten nitride thin films by plasma focus device at different axial and angular positions

43

Citations

30

References

2011

Year

M. T. Hosseinnejad, M. Ghoranneviss, G. R. Etaati, Marzieh Shirazi, Zohreh Ghorannevis

Applied Surface Science

Materials ScienceAngular PositionsPlasma Focus DeviceEngineeringSurface ScienceApplied PhysicsChemical Vapor DepositionThin FilmsGas Discharge PlasmaPlasma ApplicationPlasma Processing

References

	Year	Citations

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