Concepedia

Investigation of superlattice coatings deposited by a combined steered arc evaporation and unbalanced magnetron sputtering technique

L.A. Donohue, J. Cawley, D.B. Lewis, John S. Brooks, W.‐D. Münz

Surface and Coatings Technology · 1995 · 37 citations · 18 references

DOI

Concepts

References

18

Physics of Thin Films

G. Hass, D. Gerstenberg · Journal of The Electrochemical Society · 1964 · 1.8K citations

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Titanium aluminum nitride films: A new alternative to TiN coatings

Wolf‐Dieter Münz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 947 citations

, , +17

Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardness

Ulf Helmersson, Snejana V. Todorova, Scott A. Barnett et al. · Journal of Applied Physics · 1987 · 755 citations

, , +17

Oxidation of metastable single-phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanisms

D.C. McIntyre, J. E. Greene, G. Håkansson et al. · Journal of Applied Physics · 1990 · 536 citations

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Deposition and properties of polycrystalline TiN/NbN superlattice coatings

Xiaoyu Chu, Ming‐Show Wong, W.D. Sproul et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 188 citations

, , +17