Rapid thermal annealing of ITO films - Concepedia

Concepedia

Publication | Closed Access

Rapid thermal annealing of ITO films

120

Citations

23

References

2011

Year

Shumei Song, Tianlin Yang, Jingjing Liu, Yanqing Xin, Yanhui Li, Shenghao Han

Applied Surface Science

Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsThermal TransportRapid Thermal AnnealingThin FilmsThin Film Processing

References

	Year	Citations

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