Applied Surface Science · 2011 · 123 citations · 23 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsSemiconductor Device MaterialsThermal Properties Of MaterialsThermal Properties Of SemiconductorsThin Film AnnealingThin Film Optical PropertiesThin Film Thermal PropertiesAnnealingAnnealing KineticsAnnealing ProcessesRapid Thermal AnnealingThermal Annealing
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Effects of heat treatment on properties of ITO films prepared by rf magnetron sputtering
Yalan Hu, Xungang Diao, Cong Wang et al. · Vacuum · 2004 · 247 citations
Natural Sciences, Materials Engineering, Materials Science +16