Concepedia

Publication | Closed Access

Precise control of dry etching for nanometer scale air-hole arrays in two-dimensional GaAs/AlGaAs photonic crystal slabs

DOI

24

Citations

14

References

2007

Year

Naoki Ikeda, Yoshimasa Sugimoto, Yoshinori Watanabe, Nobuhiko Ozaki, Yoshiaki Takata, Yu Tanaka, Kuon Inoue, Kiyoshi Asakawa
Optics Communications

References

YearCitations

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