YBaCuO Epitaxial Film Formation by Magnetron Sputtering with Facing Targets I. Effects of Target and Substrate Positions

Abstract

YBa 2 Cu 3 O 7-δ (YBCO) thin films were prepared on non-rotating MgO(100) substrates at 630°C using dc magnetron sputtering with facing targets (dc-MSFT) and the influence of target and substrate positions on film characteristics, such as superconducting properties, composition ( C Cu/Y , C Ba/Y ), crystallinity and uniformity was investigated. Spatial positions at which as-grown epitaxial films with T ce =90 K were deposited were consequently found. Away from the center position, the composition of thin film deviated from a stoichiometric composition, that is, both C Cu/Y and C Ba/Y had a tendency to decrease. As-grown films with of T ce over 88 K were obtained in a 5×5 cm 2 area of the substrate. The deposition rate was about 20 Å/min at the center position and decreased by 22% at a position 2.5 cm away from the center.