Liquid Mass Sensing Using Resonating Microplates under Harsh Drop and Spray Conditions

Abstract

We have performed in situ real time mass sensing of deposited liquid volatile droplets and sprays using plate-like microstructures, with robust and reusable performance attained over harsh conditions and multiple cycles of operation. A home-built electrooptical sensing system in ambient conditions has been used. The bimorph effect on the resonant frequency of altered mass loading, elasticity, and strain had been carefully compared, and the latter were found to be negligible in the presence of nonviscous liquids deposited on top of our microplate devices. In resonant mode, the loaded mass has been estimated from measured resonant frequency shifts and interpreted from a simple, uniformly deposited film model. A minimum submicrogram detectable mass was estimated, suggesting the system’s potential for robust, fast, and reusable sensing capabilities, in the presence of volatile liquids under harsh operation conditions.