Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems

TLDR

Nanomechanical resonators now achieve fundamental resonance frequencies exceeding 1 GHz with quality factors between 1,000 and 100,000, enabling unprecedented inertial mass sensitivities that make them ideal for mass‑sensing applications. The study evaluates the ultimate mass‑sensitivity limits of nanomechanical resonators operating in vacuum. These limits are determined by fundamental physical noise processes inherent to the resonators. Analyses show that such resonators can resolve individual molecules, demonstrating immense mass‑sensing potential.

Abstract

Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 1,000 - 100,000. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo, which are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing - ultimately with resolution at the level of individual molecules.