Concepedia

Publication | Closed Access

SiO2 film formation at room temperature by gas cluster ion beam oxidation

DOI

19

Citations

10

References

1996

Year

Makoto Akizuki, Jiro Matsuo, Isao Yamada, Miyuki Harada, S. Ogasawara, A. Doi
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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