Publication | Closed Access
Highly uniform growth of GaAs and AlGaAs by large-capacity MOCVD reactor
15
Citations
9
References
1986
Year
Wide-bandgap SemiconductorElectrical EngineeringEngineeringCrystal Growth TechnologyApplied PhysicsCategoryiii-v SemiconductorUniform GrowthLarge-capacity Mocvd Reactor
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