Study of the liquid phase epitaxy process of garnet layers by induced striations

Abstract

To investigate more economically the conditions for the reproducible growth of bubble films, growth rate measurements are made with the help of induced striations which are generated by changes of the rotation rate. The growth of {111} oriented Y3–ySmyFe5–xGaxO12 epilayers is studied in dependence on time, supersaturation, and substrate rotation rate. Growth conditions and equilibrium distribution coefficients are presented for Ga and Sm. The experimental results are discussed in terms of the boundary layer model.