Nano-processing with gas cluster ion beams

Isao Yamada, Jiro Matsuo, Zinetulla Insepov, Takaaki Aoki, Toshio Seki, Noriaki Toyoda

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2000 · 89 citations · 33 references

Concepts

References

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