Concepedia

Publication | Closed Access

Nano-processing with gas cluster ion beams

DOI

88

Citations

33

References

2000

Year

Isao Yamada, Jiro Matsuo, Zinetulla Insepov, Takaaki Aoki, Toshio Seki, Noriaki Toyoda
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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