Ir photoelasticity study of stress distribution in silicon under thin film structures

Handbook on Experimental Mechanics

Experimental Techniques · 1985 · 546 citations

Engineering, Mechanical Engineering, Physics +12

Surface charge and stress in the Si/SiO2 system

S. D. Brotherton, Tim Read, D. R. Lamb et al. · Solid-State Electronics · 1973 · 59 citations

Natural Sciences, Materials Engineering, Materials Science +14

Quantitative photoelastic measurement of residual strains in undoped semi-insulating gallium arsenide

Masayoshi Yamada · Applied Physics Letters · 1985 · 43 citations · Full text

Engineering, Electrical Engineering, Materials Science +13

Two-dimensional state of stress in a silicon wafer

Hancheng Liang, Yong-xiong Pan, Shounan Zhao et al. · Journal of Applied Physics · 1992 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +17

Quantitative Measurement of Stress in Silicon by Photoelasticity and Its Application

H. Kotake, Shin. Takasu · Journal of The Electrochemical Society · 1980 · 24 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17