Modular Method for Microparts Machining and Assembly with Self-Alignment

Wire Electro-Discharge Grinding for Micro-Machining

T. Masuzawa, Masahisa Fujino, K. Kobayashi et al. · CIRP Annals · 1985 · 573 citations

Engineering, Microfabrication, Material Machining +4

A Unified Approach to Cylindrical and Spherical Elastic Waves by Method of Characteristics

Pei Chi Chou, Herbert A. Koenig · Journal of Applied Mechanics · 1966 · 90 citations

Numerical Analysis, Generalized Equations, Stress Wave +14

Self-aligned machining and assembly of high aspect ratio microparts into silicon

H.H. Langen, T. Masuzawa, Masahisa Fujino · 2005 · 15 citations

Wafer Scale Processing, Engineering, Microfabrication +6