RBS-channeling determination of damage profiles in fully relaxed Si0.76Ge0.24 implanted with 2 MeV Si ions

M. Bianconi, G. Lulli, F. Spallacci, E. Albertazzi, Roberta Nipoti, A. Carnera, C. Cellini

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 10 citations · 32 references

Concepts

References

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