Microsystem Technologies · 1997 · 15 citations · 0 references
EngineeringComputational EngineeringSystems EngineeringComputational MechanicsFinite Element AnalysisFinite Element MethodsDevice SimulationFinite Element FormulationMems ModelingMems SimulationStructural Finite Element AnalysisStructural SimulationDynamic Finite Element FormulationElement FormulationFinite Element ModelingFinite Element SimulationNetwork Simulation