Surface and Coatings Technology · 1999 · 65 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating ProcessesCoating TechnologyCoatingsSurface CoatingsThin Film Thermal PropertiesThin-film DepositionHard CoatingsMagnetron SputteringNitride Thin FilmsNitrides DepositionNitrides Thin FilmsReactive SputteringThermal Stability
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