Thin Solid Films · 2000 · 19 citations · 25 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface ScienceThin FilmsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsFilm DepositionFilm StressThin Film Deposition MaterialsThin Film Surface CharacterizationThin-film Growth Mechanisms
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