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EngineeringBioengineeringBiomedical EngineeringElectrochemistryMicroelectromechanical SystemsMicrofabricationMems FabricationMicrofabrication ProcessesMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsMicrochannel DesignMicrochannel FabricationMicrofluidic Fabrication
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Marko Hoffmann, Michael Schlüter, Norbert Räbiger · Chemical Engineering Science · 2006 · 281 citations
Natural Sciences, Mechanical Engineering, Fluid Dynamics +10
Impact of MEMS technology on society
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