Effect of average grain size on the work function of diamond films

Abstract

The work function of hydrogen-terminated polycrystalline diamond films deposited by electrophoresis on molybdenum was studied using ultraviolet photoelectron spectroscopy with 21.2 eV photons for average grain sizes ranging from 0.32 to 108 μm. The work function has a maximum of about 5.1 eV at 0.32 μm, then decreases with increasing grain size to a minimum of about 3.2 eV at an average grain size of about 4 μm and then increases to a value of about 4.8 eV at a grain size of 108 μm. The results are consistent with a model in which the work function is controlled by the work function of single crystal diamond (111) at the larger grain sizes, graphitic carbon at the smaller grain sizes, and by a negative electron affinity that increases with decreasing grain size due to defects near diamond (111) crystallite edges for the intervening grain sizes. The large change in work function (almost a factor of 2) could be useful to make conductors with different work functions for microelectronic gate structures.