Publication | Closed Access
Novel and low reflective silicon surface fabricated by Ni-assisted electroless etching and coated with atomic layer deposited Al2O3 film
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Citations
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References
2013
Year
Materials ScienceNi-assisted Electroless EtchingEngineeringMicrofabricationSurface ScienceApplied PhysicsPlasma EtchingAl2o3 FilmSilicon On InsulatorMicroelectronicsAtomic LayerSurface ProcessingDepth-graded Multilayer Coating
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