Integrated ferroelectrics · 1999 · 11 citations · 10 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationElectric ActuatorsElectrostatic ActuationElectrostatic ActuatorsFerroelectric MaterialsMems ActuatorsMems DesignElectrostatic MicroactuatorsElectrostatic MicromotorsFerroelectric PropertiesFerroelectric Thin FilmsMicroactuatorsMicroelectromechanical ActuatorsSurface Effects In Electrostatic ActuatorsVoltage
Abstract The principle of the operation of the step petalous micromotors based on the effect of the electrostatic rolling on the ferroelectric surface is considered. These micromotors produced by means of microelectronic technology are distinguished as being energy-intensive (more than 1 J/m2 at 20–40 V voltage) and they provide precise movement: the step ranges from 10 Å to 100 μm. The technical and experimental data are given characterizing the energetic and mechanical parameters of these micromotors.
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A bistable snapping microactuator
Hirotsugu Matoba, Tomohiro Ishikawa, C.-J. Kim et al. · 2002 · 84 citations
Engineering, Electrical Engineering, Materials Engineering +17
Ferroelectric properties of thin strontium barium niobate films
V. D. Antsigin, V. M. Egorov, É. G. Kostsov et al. · Ferroelectrics · 1985 · 36 citations