Optical reflectometry with micrometer resolution for the investigation of integrated optical devices

Abstract

An optical time-domain reflectometry (OTDR) system using an infrared subpicosecond pulse source in conjunction with balanced heterodyne detection is discussed. Experimental results show a density of more than 100 dB and a resolution of 60 mu m in air. Taking advantage of the large tuning range of the laser system, it is possible to improve the resolution to less than 10 mu m. The applicability of the OTDR system for the diagnostics of integrated optical devices is demonstrated for a simple GaAs waveguide structure.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>