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Effects of substrate bias voltage on projection growth in chromium nitride films deposited by arc ion plating

Materials ScienceMaterials EngineeringEpitaxial GrowthEngineeringSurface ScienceApplied PhysicsChromium Nitride FilmsSubstrate Bias VoltageProjection GrowthChemical DepositionMicroelectronicsChemical Vapor DepositionThin Film Processing