Concepedia
Journal of the Korean Physical Society · 2009 · 13 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsCoatingsSurface CoatingsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsMulti-layer CoatingsSputter DepositionSputteringSputtering TechniquesSurface Sputtering