104 nm period grating fabrication in fused silica by immersion two-beam interferometric laser induced backside wet etching technique

Refractive index of water and steam as function of wavelength, temperature and density

Peter Schiebener, J. Sträub, J. M. H. Levelt Sengers et al. · Journal of Physical and Chemical Reference Data · 1990 · 524 citations

Natural Sciences, Physics, Optics +11

One-step microfabrication of fused silica by laser ablation of an organic solution

J. Wang, Hiroyuki Niino, A. Yabe · Applied Physics A · 1999 · 217 citations

Engineering, Materials Engineering, Materials Science +10

Backside etching of UV-transparent materials at the interface to liquids

R. Böhme, Anika Braun, K. Zimmer · Applied Surface Science · 2002 · 107 citations

Natural Sciences, Materials Engineering, Materials Science +12

Fabrication of micro-optical elements in quartz by laser induced backside wet etching

G. Kopitkovas, Thomas Lippert, Christian Dávid et al. · Microelectronic Engineering · 2003 · 77 citations

Engineering, Materials Engineering, Materials Science +12

Excimer laser-induced etching of sub-micron surface relief gratings in fused silica using phase grating projection

K. Zimmer, R. Böhme, A. Braun et al. · Applied Physics A · 2002 · 71 citations

Engineering, Materials Engineering, Materials Science +15