Concepedia

R. Böhme

RB

35

Publications

999

Citations

19

H-Index

2002

Active since

Affiliations

Leibniz Institute of Surface Engineering(Current)

Leibniz Institute for Neurobiology

Foundation for Research and Technology Hellas

University of Szeged

Leibniz Association

R. Böhme is an author at Leibniz Institute of Surface Engineering specializing in engineering, applied physics, and optical properties.

Top concepts

Publications per year

2002–2010

35

Publications

35

Backside etching of UV-transparent materials at the interface to liquids

R. Böhme, Anika Braun, K. Zimmer · Applied Surface Science · 2002 · 107 citations

, , +9

Excimer laser-induced etching of sub-micron surface relief gratings in fused silica using phase grating projection

K. Zimmer, R. Böhme, Anika Braun et al. · Applied Physics A · 2002 · 71 citations

, , +13

Laser etching of fused silica using an adsorbed toluene layer

K. Zimmer, R. Böhme, B. Rauschenbach · Applied Physics A · 2004 · 59 citations

, , +9

Surface characterization of backside-etched transparent dielectrics

R. Böhme, D. Spemann, K. Zimmer · Thin Solid Films · 2004 · 49 citations

, , +6

The influence of the laser spot size and the pulse number on laser-induced backside wet etching

R. Böhme, K. Zimmer · Applied Surface Science · 2005 · 44 citations

, , +11

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