Applied Surface Science · 2003 · 16 citations · 21 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface ScienceThin FilmsChemical Vapor DepositionPhysical Vapor DepositionThin Film Surface MorphologyThin-film DepositionThin-film MaterialsInterfacial ChemistryThin Film Surface CharacterizationThin-film Interface Engineering
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