Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint

Free-standing SU-8 microfluidic chips by adhesive bonding and release etching

Santeri Tuomikoski, Sami Franssila · Sensors and Actuators A Physical · 2005 · 118 citations

Engineering, Microfabrication, Applied Physics +7

Antireflection sub-wavelength gratings fabricated by spin-coating replication

Yoshiaki Kanamori, Emmanuel Roy, Y. Chen · Microelectronic Engineering · 2005 · 107 citations

Materials Science, Photonics, Transient Grating +7

Study on polarizing visible light by subwavelength-period metal-stripe gratings

Bernd Schnabel · Optical Engineering · 1999 · 72 citations

Materials Science, Polarization Effect, Polarization Ratios +13

Fabrication of large area 100 nm pitch grating by spatial frequency doubling and nanoimprint lithography for subwavelength optical applications

Zhaoning Yu, Wei Wu, Lei Chen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 69 citations

Optical Materials, Engineering, Large Area 100 +26

High density patterns fabricated in SU-8 by UV curing nanoimprint

Xudi wang, Yifang Chen, Shahanara Banu et al. · Microelectronic Engineering · 2007 · 39 citations

Materials Science, Engineering, Microfabrication +10